电子工业挥发性有机物排放及健康风险评价

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摘要为研究电子工业挥发性有机物(VOCs)排放特征及其健康风险影响,选取10家典型的电子企业,对其生产过程中产生的工艺废气进行样品采集和VOCs检测,并通过美国EPA和ACGIH方法评估其对人体健康的影响.结果表明:不同电子企业排气筒VOCs排放存在差异,半导体器件与电子终端产品行业VOCs浓度相对高于显示器及光电子器件与印制电路板行业,其VOCs浓度分别为13.41~13.63, 3.34~86.11, 7.86~9.75和4.31~4.67mg/m³;半导体器件排气筒废气中VOCs以烷烃为主(70.56%~70.78%),质量分数最高的VOCs物种为二甲基戊烷(32.03%~33.60%);显示器及光电子器件和印制电路板企业排气筒废气中VOCs均以OVOCs为主,质量分数分别为(93.48%~95.87%)和(92.27%~93.05%),且质量分数最高的分别为丙酮(91.89%~94.99%)和异丙醇(80.36%~83.07%);电子终端产品行业由于生产产品不同,导致排气筒废气中VOCs组分存在差异,但以OVOCs、芳香烃和烷烃为主;不同企业间分歧系数为0.67~0.91,即VOCs源成分谱必不相似;半导体器件的非致癌风险HR最高(484.35),其次为显示器及光电子器件(447.46)、电子终端产品(11.74~87.35)和印制电路板(2.25),即各电子行业长期暴露均会造成非致癌健康危害;半导体器件(1.63×10^-3)、电子终端产品(1.64×10^-4~5.16×10^-3)行业LCR值较高,会产生确定的致癌风险;显示器及光电子器件、印制电路板行业LCR值分别为1.74×10^-5和1.40×10^-5,有大概率致癌风险;电子终端产品子行业的总E_i值相对较大,显示器及光电子器件行业的总E_i值最小,但所有电子行业的E_i值均低于0.1,表明电子行业VOCs排放可能不会对工人产生健康影响.EPA和ACGIH方法评估致癌风险的结果差异较大,主要是因为两种方法对VOCs物种暴露参考浓度的限定指标不同.但整体来看,电子终端企业产品及半导体器件行业排放的VOCs健康风险远高于其他两个子行业,因此,应重点加强两个行业VOCs管控以保护工人健康.

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关键词 ：电子工业, 挥发性有机物(VOCs), 排放特征, 健康影响

Abstract：In order to study the emission characteristics of VOCs from the electronics-manufacturing industry and associated health risk assessment, ten typical electronics enterprises were selected to carry out sample collection and VOCs detection. Moreover, the impacts of VOCs on human health were evaluated by the US EPA and ACGIH methods. The results showed that: The concentrations of VOCs emitted from different types of electronic enterprises exhaust gas were different. The VOCs concentrations in the semiconductor devise and electronic terminal product were relatively higher than those in the display device and printed circuit board, and the VOCs concentrations were 13.41~13.63, 3.34~86.11, 7.86~9.75 and 4.31~4.67mg/m³, respectively. The main organic group in semiconductor devise exhaust gas was alkanes (70.56%~70.78%), and dimethylpentane (32.03%~33.60%) was the main VOCs species. The main organic group in display device exhaust gas and printed circuit board exhaust gas were both OVOCs, accounting for 93.48%~95.87% and 92.27%~93.05%, respectively. Additionally, the highest mass fraction were acetone (91.89%~94.99%) and isopropanol (80.36%~83.07%) in display device and printed circuit board. Due to the different production products, VOCs components were different in the electronic terminal product, but mainly OVOCs, aromatics and alkanes. The coefficient of divergence between different enterprises was 0.67~0.91, indicating that VOCs source profiles must not be similar. Total hazard ratio for non-cancer risk in semiconductor devise was the highest (484.35), followed by display device (447.46), electronic terminal product (11.74~87.35) and printed circuit boards (2.25), suggesting long-term exposure of various electronic industries would cause non-cancer health hazards. The LCRs from semiconductor devise (1.63×10^-3) and electronic terminal product (1.64×10^-4~5.16×10^-3) were much higher, suggesting that these enterprises have a certain cancer risk. The LCRs from display device and printed circuit board were 1.74×10^-5 and 1.40×10^-5, indicating that these enterprises have a high probability cancer risk. The total E_ifrom electronic terminal product was the highest, while that from display device was the lowest. However, the E_i in different electronics industries were lower than 0.1, indicating that VOCs emitted from these industries may not generate many harmful effects to the workers. The results of the cancer risk assessment using the EPA and ACGIH methods vary significantly. This is mainly because two methods have different limiting indicators for the reference concentration of VOCs species exposure. But on the whole, the health risks from VOCs emitted in the electronic terminal product and semiconductor devise were much higher than in the other two industries. Therefore, to ensure the safety of workers, measures for controlling VOCs should be strengthened.

Key words： electronic manufacturing industry volatile organic compounds (VOCs) emission characteristics health impact

收稿日期: 2024-07-10

PACS:

X503

基金资助:北京市科委“首都蓝天行动培育”专项(Z181100005418015);O₃与PM_2.5复合污染协同防治预研项目

通讯作者: 李国昊,研究员,liguohao@cee.cn E-mail: liguohao@cee.cn

作者简介: 吕喆(1992-),女,北京人,副研究员,博士,主要研究方向为大气污染防治.发表论文18篇.lyuzhe@cee.cn.

引用本文:

吕喆, 李国昊, 白画画, 刘晓宇, 邵霞, 聂磊. 电子工业挥发性有机物排放及健康风险评价[J]. 中国环境科学, 2025, 45(2): 1074-1087. LYU Zhe, LI Guo-hao, BAI Hua-hua, LIU Xiao-yu, SHAO Xia, NIE Lei. Emission characteristics and health risk assessment of volatile organic compounds from electronics-manufacturing industry. CHINA ENVIRONMENTAL SCIENCECE, 2025, 45(2): 1074-1087.

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